대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 2000년도 하계학술대회 논문집 C
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- Pages.1763-1765
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- 2000
Hot Wire CVD법에 의한 미세결정 실리콘 박막의 저온 증착
Low Temperature Deposition of $\mu$ c-Si:H Films by Hot Wire CVD
- 이정철 (한국에너지기술연구소 태양광발전연구팀) ;
- 강기환 (한국에너지기술연구소 태양광발전연구팀) ;
- 김석기 (한국에너지기술연구소 태양광발전연구팀) ;
- 윤경훈 (한국에너지기술연구소 태양광발전연구팀) ;
- 송진수 (한국에너지기술연구소 태양광발전연구팀) ;
- 박이준 (한국에너지기술연구소 태양광발전연구팀)
- Lee, Jeong-Chul (Photovoltaic Research Team, Korea Institute of Energy Research) ;
- Kan, Ki-Whan (Photovoltaic Research Team, Korea Institute of Energy Research) ;
- Kim, Seok-Ki (Photovoltaic Research Team, Korea Institute of Energy Research) ;
- Yoon, Kyung-Hoon (Photovoltaic Research Team, Korea Institute of Energy Research) ;
- Song, Jin-Soo (Photovoltaic Research Team, Korea Institute of Energy Research) ;
- Park, I-Jun (Photovoltaic Research Team, Korea Institute of Energy Research)
- 발행 : 2000.07.17
초록
This paper presents deposition and characterizations of microcrystalline silicon (
키워드