Dynamic Characteristics of Vertically Coupled Structures: Application to Micro Gyroscopes

수직방향으로 연성된 구조물의 진동 특성: 마이크로 자이로센서에 응용

Dynamic characteristics of a vertically coupled structure used for micro gyroscopes, is studied. The coupled motion between the reference and sensing vibrations causes the zero-point output which means non-zero sensing vibration without angular velocity. This structural coupling deteriorates sensing performance and dynamic stability. We theoretically analyze dynamic characteristics associated the coupling phenomenon. Effects of reference frequency and coupling factor on the rotational direction and amplitude of elliptic oscillation are studied. A method to predict the existence of curve veering or crossing in frequency trajectories is introduced for the application to the design of micro gyroscopes with a vertically decoupled structure.