원판형 드래그펌프내의 희박기체유동

Rarefied Gas Flows in Spiral Channels of a Disk-Type Drag Pump

The direct simulation Monte Carlo (DSMC) method is applied to investigate the flow field of a disk-type drag pump. The pumping channels are cut on both sides of a rotating disk. The rotor has 10 Archimedes' spiral blades. In the present DSMC method, the variable hard sphere model is used as a molecular model, and the no time counter method is employed as a collision sampling technique. For simulation of diatomic gas flows, the Larsen-Borgnakke phenomenological model is adopted to redistribute the translational and internal energies.