제어로봇시스템학회:학술대회논문집

Institute of Control, Robotics and Systems (제어로봇시스템학회)
권호 표지

Clean mobile robot for wafer transfer

Wafer 낱장 반송용 이동 로봇의 개발

  • 성학경 (삼성전자 자동화연구소) ;
  • 이성현 (삼성전자 자동화연구소) ;
  • 김성권 (삼성전자 생산기술센타)
  • Published : 2000.10.01
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Abstract

The clean mobile robot for wafer transfer is AGV that carry each wafer to each equipment. It has wafer handling technology, wafer ID recognition technology, position calibration technology using vision system, and anti-vibration technology. Wafer loading/unloading working accuracy is within ${\pm}$1mm, ${\pm}$3$^{\circ}$. By application of this AGV, we can reduce the manufacturing tack time and bring cost down of equipment.

Keywords