제어로봇시스템학회:학술대회논문집

Institute of Control, Robotics and Systems (제어로봇시스템학회)
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Design of 3 DOF Parallel Micro Robot

3자유도 병렬형 마이크로 로봇 설계

  • 나흥열 (한양대학교 전자컴퓨터공학부) ;
  • 이병주 (한양대학교 전자컴퓨터공학부) ;
  • 서일홍 (한양대학교 전자컴퓨터공학부) ;
  • 김희국 (고려대학교 제어계측공학과)
  • Published : 2000.10.01
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Abstract

Micro positioning mechanism is the key technology in many fields, such as scanning electron microscopy (SEM), x-ray lithography, mask alignment and micro-machining. In the paper, a 3DOF parallel-type micro-positioning mechanism is proposed. This mechanism uses piezo-actuators and Flexure hinge to control x, y and $\theta$ motion. It is shown both analytically and numerically that 2 DOF flexure hinge model was better precision than 1 DOF flexure hinge design.

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