제어로봇시스템학회:학술대회논문집
- 2000.10a
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- Pages.429-429
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- 2000
Design of 3 DOF Parallel Micro Robot
3자유도 병렬형 마이크로 로봇 설계
Abstract
Micro positioning mechanism is the key technology in many fields, such as scanning electron microscopy (SEM), x-ray lithography, mask alignment and micro-machining. In the paper, a 3DOF parallel-type micro-positioning mechanism is proposed. This mechanism uses piezo-actuators and Flexure hinge to control x, y and
Keywords