Fast and Fine Tracking Control System Using Coarse/Fine Compound Actuation

A dual-stage positioner for fast and fine robotic manipulations is presented. By adopting the merits of both coarse and fine actuator, a desirable system having the capacity of large workspace with high resolution of motion is enabled. We have constructed an ultra precision XY positioner with dual-stage mechanism where the PZT driven fine stage is mounted on the motor driven XY positioner and applied it to fine tracking controls and micro-tele operations as a slave manipulator. We describe essential merits of the compound actuation mechanism and some control strategies to successfully utilize it with proper servo system design. Through experimental results, the effectiveness of the coarse/fine manipulation by the dual-stage positioner will be shown.