Structural Analysis and Design of Robust Motion Controllers for High-Accuracy Positioning Systems

In this paper, a structural design method of robust motion controllers for high-accuracy positioning systems, which makes it possible to predict the performance of the whole closed-loop system, is proposed. First, a stabilizing control input is designed based on robust internal-loop compensate.(RTC) for the system in the presence of uncertainty and disturbance. Next, using the structural characteristics of the RIC, disturbance attenuation properties and the performance of the closed-loop system determined by the variation of controller gains are analyzed. Through this analysis, in some specific applications, it is shown that if the control gain of RIC is increased by N times, the magnitude of error is reduced to its 1/N. Finally, the proposed method is verified through experiments using a high-accuracy positioning system used in the semiconductor chip mounting devices.