Development of measuring and calibrating technology for moving error and precision of chip mounter using Ball Bar

Ball Bar를 이용한 칩마운터의 운동 오차 정밀도 측정 및 평가 기술 개발

A kinematic ball bar measuring system can analyze the various errors of a machine tool easil rapidly with only one measurement, But it cannot be used to measure the errors of the equipment the semiconductor manufacturing (e.g. chip mounter, PCB router etc.) not to use a cir interpolation. This paper presents the method to apply a kinematic ball bar measuring system tc machines which use merely a linear interpolation Also, the work of measuring and calibratir various errors of a chip mounter with a kinematic bal1 bar measurement system is accomplished