Finite Element Analysis on the Motion Error of Hydrostatic Table

FEM을 이용한 유정압테이블의 운동정밀도 해석

In order to achieve systematical method for improving motion accuracy of hydrostatic table, an algorithm using finite element method is proposed in this paper. Quantification of averaging effect of oil film on motion error is performed theoretically by analysis on the relationship between spacial frequency of rail form error and motion error of table. Influences of film stiffness and pocket size on the motion error of table are also analyzed theoretically Validity of the algorithm is verified experimentally from the test on the motion error of table with three types of rail which have different form profile. Experimental results show that the algorithm is very effective to analyze theoretically the motion error of hydrostatic table.