Measuring System of Surface Roughness for On-The-Machine using Diffraction Light

회절광을 이용한 기상계측용 표면거칠기의 측정시스템

This paper deals wi th the establishment of the method of non-contact surface roughness measurement by developed system. One of the most Important factor of determinating quality of a produced manufacture is surface roughness The tendency of manufacturing method is changing from small amount manufactures / high-volume production to large amount manufactures / low volume production, and the study of reducing time for surface roughness measurement has been actively investigated The non-contact surface roughness method by using laser which is different from contact method has been only used to the polished surface, so new surface roughness measurement method was adopted by virtue of Fraunhofer diffraction in the periodic surface for on-the-machine. in this paper, we establish the method of non-contact surface roughness measurement which can reduce measuring time in the periodic surface