Proceedings of the Korean Society of Potoscience Conference (한국광과학회:학술대회논문집)

Korean Society of Photoscience (한국광과학회)
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Progress of Photoresist Materials for Gigabit IC Photolithography

Gigabit 반도체 광미세가공용 감광재료의 발전과 전망

  • Ahn Kwang-Duk (Molecular Engineering Laboratory, Polymer & Biomaterials Research Center Korea Institute of Science and Technology)
  • Published : 2000.06.01
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