한국정보디스플레이학회:학술대회논문집
- 한국정보디스플레이학회 2000년도 제1회 학술대회 논문집
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- Pages.57-58
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- 2000
Well aligned carbon nanotubes grown on a large area Si substrate by thermal CVD
- Lee, Cheol-Jin (School of Electrical Engineering, Kunsan National University) ;
- Park, Jung-Hoon (School of Electrical Engineering, Kunsan National University) ;
- Son, Kwon-Hee (School of Electrical Engineering, Kunsan National University) ;
- Kim, Dae-Woon (School of Electrical Engineering, Kunsan National University) ;
- Lee, Tae-Jae (School of Electrical Engineering, Kunsan National University) ;
- Lyu, Seung-Chul (School of Electrical Engineering, Kunsan National University) ;
- Kang, Seung-Youl (Microelectronics Labs., Next Generation Semiconductor Research Dept., ETRI) ;
- Lee, Jin-Ho (Microelectronics Labs., Next Generation Semiconductor Research Dept., ETRI) ;
- Park, Hyun-Ki (Flat display Labs., R&D Center, Samsung Display Devices Co.) ;
- Lee, Chan-Jae (Flat display Labs., R&D Center, Samsung Display Devices Co.) ;
- You, Jong-Hun (Flat display Labs., R&D Center, Samsung Display Devices Co.)
- 발행 : 2000.01.13
초록
we have grown vertically aligned carbon nanotubes on a large area of Co-Ni codeposited Si substrates by thermal chemical vapor deposition using
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