Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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Magnetic Properties of Fe-System Thin Films with Non-equilibrium Phases

비평형 Fe계 박막의 자기 특성

  • 김현식 ((주) 매트론) ;
  • 민복기 (한국전기연구소 박형전기소자 T.F.T) ;
  • 송재성 (한국전기연구소 박형전기소자 T.F.T) ;
  • 오영우 (경남대학교 신소재공학부) ;
  • 이원재 (한국전기연구소 박형전기소자 T.F.T) ;
  • 이동윤 (한국전기연구소 박형전기소자 T.F.T) ;
  • 김인성 (한국전기연구소 박형전기소자 T.F.T)
  • Published : 2000.05.13
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Abstract

In this study, we have fabricated nonequilibrium $Fe_{85.6}Zr_{3.3}B_{5.7}Ag_{5.4}$ thin film, which contains an additional insoluble element Ag, by using DC magnetron sputtering method. We have investigated the magnetic properties of amorphous $Fe_{85.6}Zr_{3.3}B_{5.7}Ag_{5.4}$ thin film as a function of rotational field annealing(RFA). After deposition, the amorphous $Fe_{85.6}Zr_{3.3}B_{5.7}Ag_{5.4}$ thin film annealed by rotational field annealing method at $350^{\circ}C$ for an hour was founded to have high permeability of 8680 of 100 MHz, 0.2 mOe, low coercivity of 0.86 De and very low core loss of 1.3 W/cc at 1 MHz, 0.1T.

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