전력전자학회:학술대회논문집 (Proceedings of the KIPE Conference)
- 전력전자학회 2001년도 Proceedings ICPE 01 2001 International Conference on Power Electronics
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- Pages.89-92
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- 2001
Voltage Source Resonant Inverter for Excimer Gas Discharge Load
- Koudriavtsev Oleg (The Graduate School of Engineering and Science, Power Electronic Systems and Control Engineering Laboratory, Yamaguchi University) ;
- Nakaoka Mutsuo (The Graduate School of Engineering and Science, Power Electronic Systems and Control Engineering Laboratory, Yamaguchi University)
- 발행 : 2001.10.01
초록
Silent gas discharge method has been widely applied for ozone production, ultraviolet light and UV laser generation. Since ozone and ultraviolet applications have tendency to spread widely in industry, the development of efficient and low-cost power supply for such systems is a task of great impotency. This paper introduces high-frequency inverter type mode power supply designed for ozone generation tube and ultraviolet generation excimer lamp and considerations on this inverter and pulse density modulation control strategy applied in it.
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