Development of Precision Vision Inspection System for Micro Optical Parts using a New Optical Probe Implemented to have Multiple Fields of Views

다중광학창을 가진 광학소자 자동 검사 시스템 개발

The micro optical parts such as ferrules are required to be manufactured within very small tolerances, as the slight deviation of the tolerance would give very large amount of loss in communication efficiency. For efficient optical communication, outer diameter, fiber diameter, fiber separation and eccentricity are significant parameters to be inspected., Thus we developed an automatic inspection system to evaluate shape parameters of the optical fiber connectors(ferrule) upto submicron accuracy using machine vision. new optical probe of multi fields of views has been developed and the image processing and data analysis algorithms have been complemented in real time basis. The developed system is successfully used in the practical ferrule manufacturing industry, and about 0.1$\mu\textrm{m}$ accuracy can be obtained with very fast inspection time.