Development of acoustic emission sensor using piezoelectric elements and monitoring system for polishing process

압전소자를 이용한 AE센서 및 연마공정 감시장치 개발

Recently, machining process monitoring technique based on AE(acoustic emission) signal is used widely and becomes very important technique in machining process for improving the efficiency and the confidence of the systems. In this study, we fabricated a cheap acoustic emission sensor and monitoring system and estimated the properties of them through comparing with commercial AE sensor systems. In addition, we evaluated the performance of the fabricated sensor in polishing process. Futhermore, we are scheduled to develop the multi-point polishing process monitoring system through fabrication of the more AE sensors and complement of the monitoring system.