Proceedings of the Korean Society of Precision Engineering Conference (한국정밀공학회:학술대회논문집)
- 2001.04a
- /
- Pages.865-868
- /
- 2001
- /
- 2005-8446(pISSN)
A thermoelastic microactuator with planar latch-up operation
Latch-up 특성을 갖는 평면형의 열구동 마이크로 액츄에이터
Abstract
We designed and fabricated a planner-type thermoelastic microactuator with a latch-up operation for optical switching. Latch-up actuation is prerequisite to implement an optical switch with low power consumption and high reliability. The proposed microactuator consists of four cantilever-shaped thermal actuators, four displacement linkages, two shallow arch-shaped leaf springs, a mobile shuttle mass with a micromirror, and four elastic boundaries. The structural layer of the planar microactuator is phosphorous-doped 12