Resonant Properties of Modified $PvTiO_3$System Ceramics for High frequency Resonator

고주파 레조네이터용 변성 $PvTiO_3$계 세라믹스의 공진특성

In this study, P $b_{0.88}$(L $a_{a}$N $d_{l-a}$)$_{0.08}$(M $n_{1}$3/S $b_{2}$3/)$_{0.02}$ $Ti_{0.98}$ $O_3$system ceramics were manufactured for 20 MHz class resonator application. Electromechanical coupling factor, mechanical quality factor and dynamic range of 3rd overtone thickness vibration mode were measured as the variations of La and Nd molar ratio. Mechanical quality factor and dynamic range at $\alpha$=0.6 composition ceramics showed the highest value of 2, 691 and 52.37 dB, respectively. The tempearture coefficient of resonant frequency measured from -2$0^{\circ}C$ to 8$0^{\circ}C$ showed an excellent value of 5ppm/$^{\circ}C$ at $\alpha$ = 1 composition ceramics. ceramics.s.