Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 2001.11a
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- Pages.82-82
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- 2001
Characteristics of zirconium silicate films prepared by reactive co-sputtering
co-sputtering을 이용한 zirconium silicate 박막의 특성 연구
Abstract
Keywords