C/SiC 복합재료 제조시 Pulse-CVI에서 증착변수의 영향 연구

Studies on Effects of Deposition Parameters in Manufacturing of C/Sic composites by Pulse-CVI

  • 김용탁 (홍익대학교 공과대학 화학공학과) ;
  • 김영준 (홍익대학교 공과대학 화학공학) ;
  • 정귀영 (홍익대학교 공과대학 화학공학과)
  • 발행 : 2001.10.01


Ceramic fiber-reinforced composites have good mechanical properties in hardness and durability. In this study, we studied the formation of SiC/C composites from methyltrichlorosilane and hydrogen by the Pulse-chemical vapor infiltration(PCVI) to deposit silicon carbide around the changes of the amount of deposit. SiC/C composites formed at $950^{\circ}C$, 20torr, Pulse-times (5s/60s). SEM of the cross sectional area of semple showed deposited silicon carbide around fibers.