Proceedings of the Optical Society of Korea Conference (한국광학회:학술대회논문집)
- 2001.02a
- /
- Pages.256-259
- /
- 2001
Calibrations in rotating compensator spectroscopic ellipsometry
회전보상기를 이용한 분광타원기술에 있어서의 캘리브레이션
Abstract
Rotating-compensator type ellipsometer was developed for spectroscopic measurements. For accurate data reduction, the azimuths of transmission axises of polarizer and analyzer, and the angular position of the fast axis of compensator should be determined through calibration process. In this paper, we present various calibration methods.
Keywords