Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2001.11b
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- Pages.390-393
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- 2001
Fabrication of Electrostatic Chucks Using Borosilicate Glass Coating as an Insulating Layer
붕규산염 유리를 절연층으로 도포한 정전척의 제조
- Published : 2001.11.08
Abstract
This study demonstrated the feasibility of tape casting method to fabricate soda borosilicate glass-coated stainless steel electrostatic chucks(ESC) for low temperature semiconductor processes. The glass coatings on the stainless steel substrates ranged from
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