한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2001년도 춘계학술대회 논문집 센서 박막재료
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- Pages.32-34
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- 2001
대기압 저온 플라스마를 이용한 산화막 및 고분자 재료의 표면개질
Surface Modification of Conductive Oxide films and Polymer Materials Employing Atmospheric Cold Plasma Surface Modification of Conductive Oxide films and Polymer Materials Employing Atmospheric Cold Plasma
- Lee, Bong-Ju (Division of Physics and Chemistry, College of Nature Science, Chosun University) ;
- Lee, Hyun-Kyu (Division of Metallurgical and Materials Engineering, College of Engineering, Chosun University) ;
- Kim, Chang-Suk (Division of Electrical And Control & Instrumentatin Engineering, College of Engineering, Chosun University) ;
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Lee, Kyung-Sub
(Division of Electrical and Electronics Engineering, College of Engineering, Dong-Shin University)
;
- Kim, Hyung-Kon (Department of Electrical Engineering, Chosun College of Science & Technology) ;
- Chang, Hyun (Division of Electrical Eletronics Information, Sunchon First College)
- 발행 : 2001.05.11
초록
we have quantitatively investigated the possibility of feeding oxygen radical in air environment. The oxygen radical generation from the plasma was verified and its efficiency was found to be dependent on the cathode material by the analysis with optical emission spectroscopy as well as by the quartz crystal micro-balance method.