한국진공학회:학술대회논문집 (Proceedings of the Korean Vacuum Society Conference)
- 한국진공학회 2001년도 창립10주년 제20회 학술발표회
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- Pages.65-66
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- 2001
Influence of surface energy on the microstructure evolution of AlN films synthesized by D.C magnetron sputtering
- Chung, Y.M. (Center for Advanced Plasma Surface Technology, Sungkyunkwan university) ;
- Min, M.J. (Center for Advanced Plasma Surface Technology, Sungkyunkwan university) ;
- Kim, Y.M. (Center for Advanced Plasma Surface Technology, Sungkyunkwan university) ;
- Han, J.G. (Center for Advanced Plasma Surface Technology, Sungkyunkwan university)
- 발행 : 2001.02.22