Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 2001.02a
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- Pages.184-184
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- 2001
Growth of $ZrO_{2}$ Thin Films Using RF Magnetron Sputtering and Study of Their Surface Characteristics
- Sin, Yong-Sup (Department of Chemistry, Sungkyunkwan University) ;
- Bae, In-Seob (Department of Chemistry, Kookmin University) ;
- Kwak, Hyon-Tae (Department of Chemistry, Kookmin University) ;
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Boo, Jin-Hyo
(Department of Chemistry, Sungkyunkwan University)
- Published : 2001.02.22
Abstract
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