STM Observation Of Stress-Induced Leakage Current Sites In The Ultra Thin Oxide On Si Surface.

  • Shin, Ji-Shik (Institute of Physics and Applied Physics (IPAP) and Atomic-scale Surface Science Research Center (ASSRC), Yonsei University) ;
  • Jung, Jong-Hoon (Institute of Physics and Applied Physics (IPAP) and Atomic-scale Surface Science Research Center (ASSRC), Yonsei University) ;
  • Moon, Ki-Young (Institute of Physics and Applied Physics (IPAP) and Atomic-scale Surface Science Research Center (ASSRC), Yonsei University) ;
  • Ryu, Jea-Choon (Institute of Physics and Applied Physics (IPAP) and Atomic-scale Surface Science Research Center (ASSRC), Yonsei University) ;
  • Lyo, In-Whan (Institute of Physics and Applied Physics (IPAP) and Atomic-scale Surface Science Research Center (ASSRC), Yonsei University)
  • Published : 2001.02.22