Estimation of Surface Profile Using Reflected Laser Beam Pattern

레이저 빔 반사 패턴을 이용한 표면 프로파일 추정

  • Published : 2002.05.01

Abstract

An optical method for surface roughness estimation based on statistical analysis of the light intensity of a scattered laser beam pattern. The method is very simple but has a disadvantage that no more information than the averaged roughness is estimated. In this study a new try was conducted to derive more advanced surface information from the details of the light intensity distribution. Some periodic ripples among the light intensity distribution being assumed to relate with scratch left on the machined surface, a corresponding surface profile is estimated from the ripples using FFT and IFFT algorithm. IFFT technique is used to extract some dominant signal components among the intensity distribution. Compared to the measured profiles by a stylus type surf-tester, the profiles obtained through the proposed method are probably acceptable in a sense of the profile shape. Calibration of the amplitude needs more works in the future.

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