A study of the mirror design and the fabrication for an X-ray microscope

  • Kim, Woo-Soon (X-ray Microscope Research Center, Wonkwang University) ;
  • Kim, Kyong-Woo (X-ray Microscope Research Center, Wonkwang University) ;
  • Yoon, Kwon-Ha (X-ray Microscope Research Center, Wonkwang University) ;
  • Kim, Dong-Hyun (Dept. of Mechanical Engineering, Chubu University, Japan) ;
  • Namba, Yoshiharu (Dept. of Mechanical Enginering, Chubu Univ.)
  • Published : 2002.04.01

Abstract

One of the exciting research areas of the X-ray microscope is the observation of a living cell. In order to study a living cell with high resolution the order of the several tens nm, we need to improve the efficiency of mirrors which are components of an X-ray microscope system. In this paper we present the mirror design and manufacture to give a high resolution and reflectivity. We designed Wolter type I the condenser and objective mirror with the several tens of nm resolution. According to mirror design. we made the program using the visual basic. Using the new processing method as well as the ultra-precision diamond cutting, we directly processed the inside of an aluminum hulk in order to manufacture mirrors. From the experimental result, we think that the new processing method will improve a high reflectivity through the improved cutting tools and optimum cutting conditions.

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