플랫 엔드밀을 이용한 미세 홈 가공에 관한 연구

A Study on Micro-grooves Cutting Using Flat-end Mill

Mechanical micro-engineering is an easy and cheap way to fabricate micro-structures. If the application of the conventional machining method using flat-end mill becomes available for the micro-manufacturing process, it will be advanced as an extension of the conventional machining process. In this study, micro-grooves cutting using flat-end mill(($\phi$8) was performed. The characteristics on flat-end milling was investigated to improve machinability of micro-grooves. The experiments were performed according to variations of spindle revolution, depth of cut, and feed rate. Machinability through various cutting conditions was evaluated by surface geometry, tool wear, and cutting force. The results show that micro V-grooves of width(pitch) 29${\mu}{\textrm}{m}$ were acquired by flat-end milling. The maximum and minimum roughness of the wall of grooves was 438 and 67nm, respectively