한국전기전자재료학회:학술대회논문집 (Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference)
- 한국전기전자재료학회 2002년도 하계학술대회 논문집
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- Pages.362-365
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- 2002
스퍼터링 방법으로 증착한 HfO$_2$ MIM 커패시터의 유전특성
Characteristics of Metal-Insulator-Metal Capacitors with HfO$_2$ Deposited by Sputtering
초록
Hf thin films were deposited on bottom metal using a RF magnetron sputtering method followed by oxidation and annealing in O