Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 2002.05a
- /
- Pages.68-68
- /
- 2002
Deposition of ITO Thin Film for Organic EL Display by RF Magnetron Sputtering
RF 마그네트론 스퍼터링에 의한 유기 EL용 ITO 박막의 증착
- Published : 2002.05.01
Abstract
Keywords