A study on the phase calibration of the phase measuring profilometry

PMP 형상 측정법의 위상보정에 관한 연구

The 3-D measurement using a sinusoidal grating pattern projection is very attractive because of its high measuring speed and high sensitivity. When a sinusoidal amplitude grating was projected on an object, the surface-height distribution of the object is translated into a phase distribution of the deformed grating image. The phase-acquisition algorithms are so sufficiently simple that high-resolution phase maps using a CCD camera can be generated in a short time. The PMP technique is discussed, and the analysis of the systematic errors, the calibration procedure designed to determined the optimal setting of the measurement parameters is illustrated. Results of measurements and calibrations on the measurement plane objects are described.