Stability Analysis According to Hinge Type Alteration on Micro Stage for Micro Cutting Machine

초정밀 가공기용 마이크로 스테이지의 힌지 형상에 따른 안정성 해석

Ultra precision processing technology is the field which is seriously protected its technology by advanced nations. Because of this reason, this technology is very difficult to supply for domestic companies, also domestic companies are revealed the limit of technology development by itself. And then, those are depend on the technology development of advanced nation, domestic companies are not conquer application step with already developed parts. Of course, some cases of its research are succeed. those are included element technology, system technology and so on, for development of ultra precision processing system. To conquer technology holding ultra precision processing accuracy of no level, active research are needed. In this paper, stability of ultra precision cutting unit is analyzed, this unit is the kernel unit in ultra precision processing machine. According to alteration of shape and material about hinge, stability investigation is performed Through this stability investigation, trial and error is reduced in design and manufacture, at the same time, we are accumulated foundation data for un it control.