FLIP CHIP SOLDER BUMPING PROCESS BY ELECTROLESS NI

  • Lee, Chang-Youl (School of metallurgical and Materials Engineering, SungKyunKwan University) ;
  • Cho, Won-Jong (School of metallurgical and Materials Engineering, SungKyunKwan University) ;
  • Jung, Seung-Boo (School of metallurgical and Materials Engineering, SungKyunKwan University) ;
  • Shur, Chang-Chae (School of metallurgical and Materials Engineering, SungKyunKwan University)
  • Published : 2002.10.01

Abstract

In the present work, a low cost and fine pitch bumping process by electroless Ni/immersion Au UBM (under bump metallurgy) and stencil printing for the solder bump on the Al pad is discussed. The Chip used this experimental had an array of pad 14x14 and zincate catalyst treatment is applied as the pretreatment of Al bond pad, it was shown that the second zincating process produced a dense continuous zincating layer compared to first zincating. Ni UBM was analyzed using Scanning electron microscopy, Energy dispersive x-ray, Atomic force microscopy, and X-ray diffractometer. The electroless Ni-P had amorphous structures in as-plated condition. and crystallized at 321 C to Ni and Ni$_3$P. Solder bumps are formed on without bridge or missing bump by stencil print solder bump process.

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