Investigation of Hg free Electrodeless inductively capacitive tubular discharge

무수은 무전극 유도-용량형 직관형 램프 방전에 관한 연구

In this paper we introduce novel electrode structure for high efficiency discharge. We operate discharge tube under the 0.16 torr pure Xe and apply the sinusoidal wave power to the lamp with 60kHz. We measure the electric power dissipation, plasma parameters, and 828 nm IR intensity. From these data we determine the discharge efficiency, IR intensity/watt, EEDF(Electron energy distribution function). As a result we obtain that the novel electrode structure has better performance in efficiency than that of conventional external electrode system. Also we determine the EEDF for each type of electrode structure by Boltzmann stover, EELNDIF code. The result of Boltzmann equation solving show that the noble electrode system has many high energy electrons compared with the conventional system.