Design of temperature control system using cool-plate of track equipment

트랙장비용 쿨 플레이트를 이용한 웨이퍼 온도제어 시스템 설계

This paper propose a method for the temperature control using cool-plate in the track equipment. The employed control algorithm is PID control algorithm. The control gains are found using relay auto-tuning algorithm. After that the gains are adjusted manually in trial and error. The control hardware circuit is designed and implemented in the lab. The controlled temperature reached the desired value Within $\pm0.05^{\circ}C$ accuracy.