Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)

The Korean Institute of Electrical Engineers (대한전기학회)
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Implementation of Dual Servoing Using a Linear Motor and a Piezoelectric Actuator

리니어모터 및 압전구동기를 이용한 이중서보의 구현

  • Ahn, Hyun-Sik (School of Electrical Engineering, Kookmin University)
  • 안현식 (국민대학교 전자정보통신공학부)
  • Published : 2002.11.30
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Abstract

For a precise position control with the resolution of a micrometer, a dual servo system is constructed using a linear motor and a piezoelectric actuator. The switching mode dual servo algorithm is implemented on a DSP board in which A/D and D/A converters are also mounted. It is shown by the experimental results that the precise position control is performed within a few micrometer of position error by using the dual servo system.

Keywords