The Improvement of Accuracy and Measurement Speed in the Low Current Measurement System

저전류 측정 시스템에서의 정밀도 및 측정 속도 향상

  • Published : 2002.11.30

Abstract

A source meter is a basic instrument to perform a measurement of DC characteristic of semiconductor devices. the source meter can be used as variable voltage source, variable current source, voltage meter, or current meter. The accuracy of the low current measurement can be improved with the compensation of leakage current and charge and discharge current. In the low current measurement, the RC time constant is extremely big, so the measurement speed is very low. In this thesis, the analysis of the behavior of the measurement current according to the RC time constant and output capacitance and the method to accelerate the measurement speed.

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