한국정보디스플레이학회:학술대회논문집
- 한국정보디스플레이학회 2002년도 International Meeting on Information Display
- /
- Pages.159-162
- /
- 2002
X-X: Single-Crystalline Si TFTs Fabricated with ${\mu}-Czochralski$ (grain-filter) process
- Ishihara, R. (DIMES-ECTM, Delft Univ. of Technol.) ;
- Dijk, B.D.van (DIMES-ECTM, Delft Univ. of Technol.) ;
- Wilt, P.Ch. van der (DIMES-ECTM, Delft Univ. of Technol.) ;
- Metselaar, J.W. (DIMES-ECTM, Delft Univ. of Technol.) ;
- Beenakker, C.I.M. (DIMES-ECTM, Delft Univ. of Technol.)
- 발행 : 2002.08.21
초록
This paper reviews an advanced excimer-laser crystallization technique enabling precise location-control of the individual grains. With the developed
키워드