Slow Noble Ion - Induced Secondary Electron Emission Characteristics of MgO Layer.

  • Lee, Sang-Kook (School of Electrical Engineering, Seoul National University) ;
  • Kim, Jae-Hong (Division of Chemical Engineering, Seoul National University) ;
  • Lee, Ji-Hwa (Division of Chemical Engineering, Seoul National University) ;
  • Whang, Ki-Woong (School of Electrical Engineering, Seoul National University)
  • 발행 : 2002.08.21

초록

We have measured the secondary electron emission yield ${\gamma}_i$ from MgO films deposited on $SiO_2/Si$ for low energy noble ions. A pulsed ion beam technique was employed in order to suppress the surface charging effect during the measurement. From the measurement of the ion - induced secondary electron emission coefficients ${\gamma}_i$ for 5 noble ions with energies ranging from 50 eV to 225 eV, it was shown that, with increasing the kinetic energies of the incident ions, the ${\gamma}_i$ increased

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