한국정보디스플레이학회:학술대회논문집
- 한국정보디스플레이학회 2002년도 International Meeting on Information Display
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- Pages.263-267
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- 2002
Silicon Thin-film Transistors on Flexible Foil Substrates
- Wagner, Sigurd (Department of Electrical Engineering and POEM, Princeton University) ;
- Gleskova, Helena (Department of Electrical Engineering and POEM, Princeton University)
- 발행 : 2002.08.21
초록
We are standing at the beginning of the industrialization of flexible thin-film transistor backplanes. An important group of candidates is based on silicon thin films made on metal or plastic foils. The main features of amorphous, nanocrystalline and microcrystalline silicon films for TFTs are summarized, and their compatibility with foil substrate materials is discussed.
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