Advances in Vacuum Microelectronics toward Vacuum Nanotechnology for FPDs

Vacuum microelectronics has been expected to provide a number of advanced devices such as flat panel displays, high-frequency devices etc., and rapidly showing tremendous and attractive aspects toward nanotechnology. Nowadays, nanomachining and nanomaterials are coming to new targets in the development for new generation devices. Transfer Mold technique has been developed for the vacuum nanotechnology. Carbon nanotubes (CNTs) are emerging as nanomaterials and expecting the new electron sources for FED. Recent progress of vacuum microelectronics toward vacuum nanotechnology in Japan are described.