The Effect of the Plasma Treatment in ITO Film to reduce impurities in LCOS Imager

The reflective liquid crystal(LC) imager in one panel Liquid Crystal on Silicon(LCoS) System must have the properties such as fast response time, high contrast ratio(C/R) and voltage holding ratio(VHR) which are more related to the lifetime of imager than the others. As the high-output light including a short wavelength from UHP lamp is exposed to LCoS imager, the indium metal impurities, which decrease the C/R and VHR, are diffused from ITO thin film on glass. To ensure the high reliable LCoS imager for HD projection TV, we have studied the effects of the plasma treatment on ITO film to reduce impurities in imager.