한국정보디스플레이학회:학술대회논문집
- 한국정보디스플레이학회 2002년도 International Meeting on Information Display
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- Pages.548-551
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- 2002
Crystallization of Amorphous Silicon Films by Field-Aided Lateral Crystallization (FALC) technique at $350^{\circ}C$
- Park, Kyoung-Wan (Department of Ceramic Engineering, Hanyang University) ;
- Cho, Ki-Taek (Department of Ceramic Engineering, Hanyang University) ;
- Choi, Duck-Kyun (Department of Ceramic Engineering, Hanyang University)
- 발행 : 2002.08.21
초록
The crystallization of amorphous silicon (a-Si) was achieved using a field aided lateral crystallization (FALC) process at 350
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