한국정보디스플레이학회:학술대회논문집
- 2002.08a
- /
- Pages.678-680
- /
- 2002
Structure dependence of carbon nanotube on the process parameters using microwave plasma chemical vapor deposition
- Kim, Gwang-Bai (Dept. of Electronics Eng., Sejong Univ.) ;
- Lee, Soo-Myun (Dept. of Electronics Eng., Sejong Univ.) ;
- Uh, Hyung-Soo (Dept. of Electronics Eng., Sejong Univ.) ;
- Park, Sang-Sik (Dept. of Electronics Eng., Sejong Univ.) ;
- Cho, Euo-Sik (School of Electrical Eng., Seoul National Univ.) ;
- Kwon, Sang-Jik (Dept. of Electronics Eng., Kyungwon Univ.)
- Published : 2002.08.21
Abstract
Vertically aligned carbon nanotubes(CNTs) have been grown on Ni-coated TiN/Si substrate by microwave plasma chemical vapor deposition using
Keywords