Utilization of Parylene Thin Film for Passivation of Organic Light Emitting Diodes

  • Lee, Jun-Ho (School of Chemical Engineering and Technology Yeungnam University) ;
  • Kim, Jeong-Moon (School of Chemical Engineering and Technology Yeungnam University) ;
  • Lee, Jong-Seung (School of Chemical Engineering and Technology Yeungnam University) ;
  • Park, Moo-Ryoung (School of Chemical Engineering and Technology Yeungnam University) ;
  • Park, Chin-Ho (School of Chemical Engineering and Technology Yeungnam University)
  • 발행 : 2002.08.21

초록

The chemical vapor condensation process of Parylene-N thin films was investigated and applied to the passivation of the organic light emitting diodes (OLEDs). The effects of process variables on the deposition rate were studied, and it was found that the deposition rate of Parylene increases with increasing precursor sublimation temperature but decreases with increasing substrate temperature. The Parylene film was used as a passivation layer for OLEDs, and as a result, the lifetime of the passivated OLEDs was increased by a factor of about 2.3 compared with that of non-passivated OLEDs.

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