한국정보디스플레이학회:학술대회논문집
- 2002.08a
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- Pages.754-758
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- 2002
Study on the structure and morphology of vacuum-evaporated pentacene as a function of the evaporation condition
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Chang, Jae-Won
(Display and Nano Devices Laboratory, Korea Institute of Science and Technology, Dept. of Physics & TFT-LCD Nat'l Lab, Kyung Hee University)
;
- Kim, Hoon (Display and Nano Devices Laboratory, Korea Institute of Science and Technology, Dept. of Physics & TFT-LCD Nat'l Lab, Kyung Hee University) ;
- Kim, Jai-Kyeong (Display and Nano Devices Laboratory, Korea Institute of Science and Technology) ;
- Lee, Yun-Hi (Display and Nano Devices Laboratory, Korea Institute of Science and Technology) ;
- Oh, Myung-Hwan (Dept. of Electrical Engineering, Dankook University) ;
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Jang, Jin
(Dept. of Physics & TFT-LCD Nat'l Lab, Kyung Hee University)
;
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Ju, Byeong-Kwon
(Display and Nano Devices Laboratory, Korea Institute of Science and Technology)
- Published : 2002.08.21
Abstract
In order to reach the high quality of organic thin films such as high mobility for device applications, it is strongly desirable to study the growth properties of pentacene film as a function of evaporation condition. Here, we report the structure and morphology of thermal evaporated pentacene thin film by AFM, SEM, and XRD as a function of the evaporation rate and substrate temperature. These results play a key role in determining the electric performance of organic thin film transistor devices.
Keywords