Study on the structure and morphology of vacuum-evaporated pentacene as a function of the evaporation condition

  • Chang, Jae-Won (Display and Nano Devices Laboratory, Korea Institute of Science and Technology, Dept. of Physics & TFT-LCD Nat'l Lab, Kyung Hee University) ;
  • Kim, Hoon (Display and Nano Devices Laboratory, Korea Institute of Science and Technology, Dept. of Physics & TFT-LCD Nat'l Lab, Kyung Hee University) ;
  • Kim, Jai-Kyeong (Display and Nano Devices Laboratory, Korea Institute of Science and Technology) ;
  • Lee, Yun-Hi (Display and Nano Devices Laboratory, Korea Institute of Science and Technology) ;
  • Oh, Myung-Hwan (Dept. of Electrical Engineering, Dankook University) ;
  • Jang, Jin (Dept. of Physics & TFT-LCD Nat'l Lab, Kyung Hee University) ;
  • Ju, Byeong-Kwon (Display and Nano Devices Laboratory, Korea Institute of Science and Technology)
  • 발행 : 2002.08.21

초록

In order to reach the high quality of organic thin films such as high mobility for device applications, it is strongly desirable to study the growth properties of pentacene film as a function of evaporation condition. Here, we report the structure and morphology of thermal evaporated pentacene thin film by AFM, SEM, and XRD as a function of the evaporation rate and substrate temperature. These results play a key role in determining the electric performance of organic thin film transistor devices.

키워드