Bidirectional Motion of the Metal/Ceramic Composit Structure Linear Ultrasonic Motor

금속/세라믹 복합구조 선형 초음파 모터의 양방향 운동

In this paper, a single phase driven piezoelectric motor design was presented for linear motion. Two metal/ceramic composite actuators, a piezoelectric ring which was bonded to a metal endcap from one side, were used as the active elements of this motor. The motor was composed of a piezoelectric ceramic, a metal ring which has 4 arms, and a guider. Motors with 30.0[mm] and 35.0[mm] diameter were studied by finite element analysis and experiments. As results, the maximum speed of motor was obtained at resonant frequency. When the applied voltage of the motor increased, the speed was increased. Also, bidirectional motion of the motor was achieved by combining two motors which have different resonant frequency.